Aluminum nitride 氮化鋁 | AlN120 | AlN140 | AlN160 | AlN180 |
Color顏色 | Dark Gray 灰白色 | Dark Gray 灰白色 | Translucent Medium gray 半透明乳白色 | Translucent Medium gray 半透明乳白色 |
Surface roughness, Ra (μｍ) 表面粗糙度 | 0.6max | 0.6max | 0.5max | 0.5max |
Density 密度 (g/cm3) | 3.25 | 3.26 | 3.33 | 3.33 |
Flexural strength 彎曲強度(MPa) | >320 | >300 | >300 | >300 |
Compressive Strength (GPa) 抗壓強度 | 2.1 | 2.1 | 2.0 | 2.0 |
Fracture toughness 斷裂韌度 (MPa m1/2) | 3.30±0.05 | 3.30±0.05 | 3.35±0.05 | 3.35±0.05 |
Young’s modulus 楊氏模量(GPa) | 300 | 300 | 310 | 310 |
Thermal conductivity 熱導率(W/mK) | 120±10% | 140±10% | 160±10 | 180±10 |
Coeff. of thermal expansion 熱膨脹係數(10-6 K-1)RT- 100℃ | 3.6 | 3.6 | 3.6 | 3.6 |
Volume resistivity 體積電阻率(Ωcm) | >1012 | >1012 | >1013 | >1013 |
Dielectric strength 介電強度(KV/mm) | ≥18 | ≥18 | ≥20 | ≥20 |
Dielectric constant 介電常數(@1MHz) | 9.0±10% | 9.0±10% | 9.0±10% | 9.0±10% |
Melting point 熔點 | 2500℃昇華 | 2500℃昇華 | 2500℃昇華 | 2500℃昇華 |
